MOSSBAUER STUDY OF 57FE IONS IMPLANTED IN TI AND TIN

Ti and TiN layers implanted with 57Fe ions were studied by conversion electron Mossbauer spectroscopy at 295 and 80 K. In as‐implanted Ti samples the local states of iron implants were assigned to α‐Ti(Fe) and β‐Ti(Fe). In TiN, about 68% of iron implants replace Ti atoms forming Fe2N and nonstoichiometric Fe–N complexes. The remaining Fe ions replace N atoms exhibiting α‐Ti(Fe) and β‐Ti(Fe) states. The protective properties of the TiN cover layer are discussed in terms of changes of the these states after subsequent annealing in air.