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Transmission electron microscopy of silicides used in ALSB-SOI MOSFET structure
Transmission electron microscopy of silicides used in ALSB-SOI MOSFET structure
2004
J. Kątcki
J Ratajczak
A. Laszcz
E. Dubois
G. Larrieu
Xavier Baie
Keywords:
Silicon on insulator
MOSFET
Analytical chemistry
Transmission electron microscopy
Materials science
Optoelectronics
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