Characteristics of an optical fiber for high-power excimer lasers

KrF excimer laser (248 nm) is expected to be the new therapeutic instrument in the medical field. However, there is still not the optical fiber which has enough durability for the high power energy of KrF excimer laser. We have developed the optical fiber for transmitting the light of the high power KrF excimer laser. This fiber consists of the pure silica core with a large amount of OH, and also has been specially treated during fabrication. As a result, the newly developed fiber has achieved to transmit the light of KrF excimer laser efficiently.