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Using Genetic Algorithms with Local Search for Thin Film Metrology.
Using Genetic Algorithms with Local Search for Thin Film Metrology.
1997
Mark Land
John J. Sidorowich
Richard K. Belew
Keywords:
Thin film
Metrology
Theoretical computer science
Mathematical optimization
Genetic algorithm
Local search (optimization)
Computer science
Engineering drawing
Electronic engineering
Correction
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