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Ultrathin (8-14 nm) Conformal SiN for sub-20 nm Copper/Low-k Interconnects
Ultrathin (8-14 nm) Conformal SiN for sub-20 nm Copper/Low-k Interconnects
2014
Son Van Nguyen
Deepika Priyadarshini
Hosadurga Shobha
Thomas J. Haigh
Chao-Kun Hu
S. Cohen
E. Liniger
Thomas M. Shaw
Edward D. Adams
Jay Burnham
Anita Madan
N. Klymko
Christopher Parks
Daewon Yang
Steven E. Molis
Yu-Ming Lin
Griselda Bonilla
Alfred Grill
Daniel C. Edelstein
D. Canaperi
Li Qun Xia
Steven Reiter
Mihaela Balseanu
Mei Yee Shek
Keywords:
Calculus
Copper
Conformal map
Engineering
Optics
Optoelectronics
Algorithm
Correction
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