In-Plane Flexible Microsystems Integrated with High-Performance Microsupercapacitors and Photodetectors

The rapid development of wearable and portable electronics has resulted in an urgent desire for lightweight, flexible microsystems integrated with energy storage devices and other in-plane devices. An approach is proposed herein to develop an in-plane flexible microsystem on graphite paper containing an all-solid-state microsupercapacitor and a photoconductor-type photodetector based on perovskite film, where a simple, low-cost, and scalable strategy involving laser etching, electrochemical exfoliation, and electrochemical deposition can be used to fabricate the all-solid-state microsupercapacitor. The as-fabricated microsupercapacitor device exhibits high capacitance and reliable stability under testing through 100,000 cycles of dynamic bending. In the integrated microsystem, the microsupercapacitor is used to drive the photoconductive detector. It turns out that the designed integrated system exhibits a stable photocurrent response comparable to a detector driven by an external power source. This work paves the way for the fabrication of integrated microsystems where sensor systems are driven by integrated energy storage devices, applicable to future wearable and portable electronics.