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Gas-phase parasitic reactions and Al incorporation of algan growth using TPIS-MOCVD
Gas-phase parasitic reactions and Al incorporation of algan growth using TPIS-MOCVD
2002
Sunwoon Kim
Junho Seo
Kyuhan Lee
Haeseok Lee
Keunseop Park
Young Hoon Kim
Chang Soo Kim
Keywords:
Physics
Metalorganic vapour phase epitaxy
Nuclear magnetic resonance
Chemical physics
Condensed matter physics
gas phase
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