Peristaltic Micropump with Multi-Electrodes Using Electrostatic Force

2015 
An electrostatically driven multi-electrode peristaltic micropump has been developed for pumping microfluid through μ-TAS. Peristaltic-type micropumps have been reported to address many of the problems of micropumps in general and electrostatic actuation in particular. Peristaltic motion can eliminate the need for valves and for proper valve timing or for a nozzle/diffuser in designing flow control, as well as contribute to reduce the dead volume which can be a critical problem for micropump to achieve higher back pressures. In this paper, we present an electrostatically driven bidirectional peristaltic micropump that was designed, fabricated, and characterized. It was fabricated on a silicon substrate with a polyimide membrane. It was consisted of single large chamber, PI membrane operated with 4 electrodes, and 4 phase sequencing actuation. The displacement of the meniscus in the capillary tube is observed and recorded by using a video camera. The micropump was operated from 115V to 135V. The maximum moving speed of the meniscus was approximately 24 mm/min at 2.2 kHz at 115V. This pump will be applied to various microfluidic fields.
    • Correction
    • Source
    • Cite
    • Save
    • Machine Reading By IdeaReader
    9
    References
    2
    Citations
    NaN
    KQI
    []