Current Development of Trans-Scale Precision Positioning Technology Based on the Stick-Slip Effect

The trans-scale precision positioning technology has been already owned broad prospects in many engineering fields such as the nano-manipulation,large-scale IC fabrication and the bio-technics etc..The operating principles of 4 types of trans-scale precision positioning technologies of the macro-micro hybrid driving,piezoelectric ultrasonic motor driving,inchworm-type driving and slip-stick driving have been summarized in this paper and the resolution,speed,force,size,actuator numbers and structure of these 4 types of driving methods have also been compared and analyzed.The results showed that the slip-stick driving method had the advantages of the large scope movement,high resolution,simple structure,small size and high integration,thus was very suitable for the micro and nano-manipulation applications.The driving principle,key technology research and prototype experiment study of the stick-slip driving method at home and abroad were analyzed.The problems of the stick-slip driving existed in the current studies and the key technology to be resolved have also been proposed in this paper.