High precision cell slicing by harmonically actuated ultra-sharp SixNy blades

We describe a micro-knife system with an ultra-sharp blade that is harmonically actuated by lead zirconate titanate (PZT). In particular, harmonic actuation along its cutting direction is demonstrated to provide clean and sharp cut lines for hepatocytes. Such performance is not provided by ordinary ultrasonic actuation. The blade is 500 nm-thick silicon nitride (SixNy); it can cut a single cell. Finite element analysis and measurements of displacement around resonant frequencies were used to optimize the dimensions, driving frequency and voltage. To evaluate the cutting precision, commercial scalpels and the SixNy blade without and with harmonic actuation were compared. When used to cut primary hepatocytes in a mono-layer, a commercial stainless scalpel burst cells, and the SixNy blade without harmonic actuation cut cells with a wide and ragged line. However, due to the controlled ultrasonic mode shape, operating frequency, high frequency and low applied power, the SixNy blade with harmonic actuation at 1Vpp and 70.1 kHz provided a clean and sharp cut line which was as narrow as 2 µm. The SixNy blade with harmonic actuation has potential applications as a tool for minimally invasive surgery.