High performance InGaAs/InGaAsP strained quantum well lasers with AlGaAs cladding layers
1998
In this paper, we reported on the fabrication of 980 nm InGaAs/InGaAsP strained quantum well lasers with broad waveguide InGaAsP and AlGaAs cladding layers. The laser structure was grown by low-pressure metalorganic chemical vapor deposition on a n/sup +/-GaAs substrate. The lasers exhibit a high internal quantum efficiency of 93% and a low internal loss of 1.8 cm/sup -1/. For 100 /spl mu/m broad stripe coated lasers with 800 /spl mu/m, a threshold current density of 190 A/cm/sup 2/, a high slope efficiency of 1.03 W/A and a far-field pattern of 38/spl times/6/spl deg/ are obtained. We also fabricated 3 /spl mu/m-stripe ridge waveguide lasers. Their threshold current is 30 mA, and the output power operating in fundamental mode is more then 180 mW.
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