Non-contact micro mass evaluation method using an X-ray microscope

Abstract For the mass inspection of attached foils such as printed electrodes, mass should be measured by a non-contact method with the capacity to measure a small mass of micrograms. In this study, the masses of 1 mg to 10 mg electrodes were evaluated using an X-ray microscope. The results were compared with the masses determined by using a digital scale with a 0.005 mg error. The average of the relative error between the mass measurements using the X-ray microscope and those using the digital scale was less than 2.51%. The results show that X-ray mass evaluation method can be used for mass measurement of micro objects by replacing a digital scale.