Evaluation of a Flat-Field Grazing Incidence Spectrometer for Highly Charged Ion Plasma Emission in 1–10 nm

A flat-field grazing incident spectrometer was built to investigate highly charged ion (HCI) plasmas in the spectral region from 1 to 10 nm. The spectrometer consists of a flat-filed grating with 2400 lines/mm as a dispersing element and an X-ray charged-coupled device (CCD) camera as the detector. In order to produce accurate intensity calibrated spectra of the HCI plasmas, the diffraction efficiency of the grating and the sensitivity of the CCD camera were directly measured by using the reflectometer installed at the BL-11D of the Photon Factory (PF). We also studied the calibrated spectra of Gd HCI plasmas which were produced by an Nd:YAG laser.