Performance Deterioration to GHz Bulk-acoustic-wave Resonator Induced by Throughput

Ultra-high-speed vortex field generated by GHz bulk-acoustic-wave (BAW) resonator can bring well ability on particle trapping and manipulation in microfluid, but the ability is weakened when high throughput of sample solution is injected. This paper investigates mechanism of this throughput induced performance deterioration to GHz BAW resonator both theoretically and experimentally, and Region of Effective (RoE) is termed to evaluate the actual performance. Then, RoEs are measured to resonators with different excitation power in different throughput, and prevention method to the weakening is derived. This paper provides explanation to deterioration mechanism and guides to future development for GHz BAW-resonator based applications.