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MOVPE Growth of AlGaN Channel HEMTs on Annealed Sputtered AlN Templates
MOVPE Growth of AlGaN Channel HEMTs on Annealed Sputtered AlN Templates
2021
Ryuichi Mori
Kenjiro Uesugi
Tatsuya Shirato
Shigeyuki Kuboya
Kanako Shojiki
Hideto Miyake
Keywords:
Materials science
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Channel (broadcasting)
High-electron-mobility transistor
nitride semiconductors
Metalorganic vapour phase epitaxy
Optoelectronics
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