Local area network (LAN) address manufacturing and development implant tool issues

As the level of tool automation and the amount of data collected during processes continues to increase, the need for placing those tools on the fab's intranet also increases. It is possible for modern batch implanters to process between 8,000 and 12,000 runs per month. Each batch generates several files including parameter logs and associated alarm histories. Data storage, archiving and review can become an issue with this much data. In this paper we discuss how placing implant equipment on the fab's network not only solved trivial storage space issues, but enabled the replacement of faulty tape backup systems, and facilitated the ability to remotely view and download files such as implant data logs (IDLs), alarm histories, and configuration files. Modern implant tools often use workstations running operating systems that are capable of being connected to a fab's network. Once the process tools are connected, background routines can be written to perform the tracking of tool configuration changes and automatic checking of recipe files for errors. Routines can also be written to compress the IDL files into a database providing the foundation for advanced process control based on automatic IDL review. Automated review of configuration files, recipes, and IDL's improves fault detection and ultimately results in reducing scrap and improving tool utilization and productivity.