Transparent Conducting Zinc Stannate Films Prepared on α-Al2O3 (0001) by MOCVD

High quality crystalline zinc-stannate transparent conducting films were successfully prepared on sapphire substrates by MOCVD method. ZnSnO films with the proportions of tin and zinc from 1: 1 to 1:20 were prepared and ZnSnO 3 films were obtained when the proportion is 1:1. The structural, optical and electrical properties of zinc-stannate films were investigated.