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Atomic layer deposition of AlN using trimethylaluminium and ammonia
Atomic layer deposition of AlN using trimethylaluminium and ammonia
2020
M. Beshkova
P Deminskyi
H. Pedersen
R. Yakimova
Keywords:
Materials science
Atomic layer deposition
Trimethylaluminium
Inorganic chemistry
Ammonia
Correction
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