Combinatorial study of reactively sputtered Cr-Ti-N

Abstract A combinatorial study of ternary Cr–Ti–N libraries is reported. Sixteen libraries were grown with a range of metallic composition gradients and different nitrogen contents. X-ray photoelectron spectroscopy (XPS) and electron microprobe analysis (EPMA) show that these libraries encompass a large portion of the ternary phase space. Optical transmission and reflection measurements from near ultra-violet to infra-red wavelengths suggest that both the color and infra-red reflectivity can be optimized for this ternary system.