Adaptive position calibration technique for the optical micro-scanning thermal microscope imaging system

Abstract In order to improve the spatial resolution of the optical micro-scanning thermal microscope system. The micro-scanning position must be accurately calibrated. An adaptive calibration method based on the image registration and plane coordinate system is proposed. The meaning of calibration is given, and the principle and method of each point calibration are introduced in detail and the micro-scanning each point adaptive calibration of the real system was done. Different reconstruction methods were applied to reconstruct the visible light image and the real thermal microscope image, moreover the evaluation parameters were given. Results of simulation and real thermal imaging processing show the method can calibrate the micro-scanning position successfully. Then the method can significantly improve the oversampled reconstructed image quality, thus enhances the system spatial resolution. This method can also used in other electro-optical imaging systems.