High-Contrast-Gratings Reflector Based on SOI with Large-Angle Beam Steering Ability

High-contrast-gratings reflector providing phase front control of transmitted light as well as high reflectivity is presented. The properties of the beam steering and transmission are numerically studied with the Finite Element Method (FEM). The results show that the reflectivity is 90.4% and the steering angle is 36.2510 degree which is very consistent with the theoretical 40 degree.