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Low Temperature Plasma Re-Oxidation Process for Sub-60nm Device
Low Temperature Plasma Re-Oxidation Process for Sub-60nm Device
2007
Byung Hak Lee
Woong-Hee Sohn
Jae Hwa Park
Hee Sook Park
Byung-hee Kim
Gil-heyun Choi
Sung-tae Kim
U-I. Chung
Joo-Tae Moon
Keywords:
Radiochemistry
Plasma
Materials science
Analytical chemistry
re oxidation
low temperature plasma
Correction
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