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Investigation of adhesion enhancement of Cu films on Si under high energy ion irradiation by SAM/SIMS
Investigation of adhesion enhancement of Cu films on Si under high energy ion irradiation by SAM/SIMS
1991
Yang Dequan
Wang GuiHua
Fan Chuizhen
Zhai Yajun
Keywords:
Analytical chemistry
Irradiation
Adhesion
Chemistry
Ion
high energy
Correction
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