Improvement in process window aware OPC

In this paper, we present some important improvements on our process window aware OPC (PWA-OPC). First, a CDbased process window checking is developed to find all pinching and bridging errors; Secondly, a rank ordering method is constructed to do process window correction; Finally, PWA-OPC can be applied to selected areas with different specifications for different feature types. In addition, the improved PWA-OPC recipe is constructed as sequence of independent modules, so it is easy for users to modify its algorithm and build original IPs.