Low-loss BAW filters on high resistivity silicon for mobile radio

Integration of bulk acoustic wave (BAW) filters into W-CDMA mobile communication applications is of high interest, as the BAW technology allows for low-loss and high Q signal forming in these 2 GHz devices. During the design phase of low-loss BAW filters it is very important that we not only control the most major loss mechanisms, like metal conductivity and viscosity of piezo material. We also have to focus the less well known losses.