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Al2O3 Insertion Layer for Improved PEALD SiO2/(Al)GaN Interfaces
Al2O3 Insertion Layer for Improved PEALD SiO2/(Al)GaN Interfaces
2018
Jianyi Gao
Mei Hao
Wenwen Li
Zheng Xu
Saptarshi Mandal
Robert Nemanich
Srabanti Chowdhury
Keywords:
Physics
Nuclear magnetic resonance
Atomic physics
Condensed matter physics
Correction
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