Fast-Response Electrostatic Actuator Based on Nano-Gap

The possibility of constructing new high-performance electrostatic fast actuators based on energy transformation in nanometer gaps is considered. The construction and the properties of the operation of such devices as well as their typical parameters are described. The drives are based on ferroelectrics with high values of dielectric permittivity (above 1000). They can be constructed using microelectronic technology. It is demonstrated that the actuators are capable of maintaining forces with a specific density up to 106 N/m2 and up to 100–1000 N in real devices for 10–100 µs. Experimental research results of such actuators are presented.