Positive bias instability in gate-first and gate-last InGaAs channel n-MOSFETs
2014
Instability under positive bias stress in the InGaAs channel n-MOSFETs with gate last Al
2
O
3
and gate-first ZrO
2
/Al
2
O
3
process flows is investigated. It is determined that the threshold voltage shift (ΔV
T
) during stress is primarily caused by a recoverable electron trapping at the pre-existing defects located predominantly in the Al
2
O
3
interfacial layer (IL). Generation of new electron trapping defects is found to occur in the dielectric region adjacent to the substrate, while trap generation in the high-k bulk is negligible.
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