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Effect of substrate type on structure of TiO2 thin film deposited by atomic layer deposition technique
Effect of substrate type on structure of TiO2 thin film deposited by atomic layer deposition technique
2015
Rodrigo Sávio Pessoa
F. P. Pereira
G. E. Testoni
William Chiappim
H.S. Maciel
L.V. Santos
Keywords:
substrate type
Thin film
Atomic layer deposition
Materials science
Composite material
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