Old Web
English
Sign In
Acemap
>
Paper
>
Modified electron-beam evaporator for soft materials and low-vapor-pressure materials
Modified electron-beam evaporator for soft materials and low-vapor-pressure materials
2005
L. Bouzidi
J.K. Fowler
Alan J. Slavin
Keywords:
Hybrid physical-chemical vapor deposition
Ion plating
Electron beam physical vapor deposition
Thin film
Electron beam-induced deposition
Analytical chemistry
Ion beam deposition
Pulsed laser deposition
Chemistry
Vacuum deposition
Evaporator
Vapor pressure
Focused ion beam
Correction
Source
Cite
Save
Machine Reading By IdeaReader
4
References
0
Citations
NaN
KQI
[]