Linearity of Waveguide Integrated Modified Uni-Travelling Carrier Photodiode Arrays

We demonstrate high-speed and high-power evanescently-coupled waveguide modified uni-traveling-carrier photodiode arrays. The arrays consist of different numbers of optically parallel connected photodiodes. A responsivity of 0.46 A/W at 1550 nm, a 3-dB bandwidth of 28 GHz, and 12-dBm RF output power at 40 GHz were achieved with a 2 array chip. Furthermore, the linearity and 3rd order interception point were measured at different temperatures and frequencies in order to determine the limiting factor of the performance.