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Selective fabrication of Ca 2 NH and CaNH epitaxial thin films using reactive magnetron sputtering
Selective fabrication of Ca 2 NH and CaNH epitaxial thin films using reactive magnetron sputtering
2021
Seoungmin Chon
Ryota Shimizu
Yuki Sugisawa
Shigeru Kobayashi
Kazunori Nishio
Markus Wilde
Daiichiro Sekiba
Katsuyuki Fukutani
Taro Hitosugi
Keywords:
epitaxial thin film
Optoelectronics
Materials science
Sputtering
reactive magnetron
Fabrication
phase control
Correction
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