Recent advances in short-wavelength AR coatings for thinned CCDs

This paper discusses the development of two materials as AR coatings for thinned backilluminated charge-coupled devices. The first material is the heavy metal oxide Ta205 deposited as a spin on layer using sol-gel technology. The second material is Si3N4. Both these films have the high index of refraction and low absorption coefficients needed to produce good AR coatings in the near UV down to 300 nm. The goal of the program was to produce a coating which would yield devices with quantum efficiencies of greater than 50 at 300 nm. Both these materials satisfy this goal. Data on test devices will be reported. . 1.© (1992) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.