Analysis system and method for performing an analysis

2016 
Embodiments in accordance with the principal aspect is based on the realization that a heater having a first geometry, due to the thermal conductivity radiates heat in the direction of the chamber in a different geometry at the edges of the heater. Based on this finding, the shape of the chamber is adapted to the shape of the temperature distribution characteristic and not to the shape of the heater. Such a concept has beneficial effects on the temperature behavior and especially on the constants and the gradients in the chamber.
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