Performance analysis of metal-microheater integrated silicon waveguide phase-shifters

A detailed theoretical and experimental study of metal-microheater integrated silicon waveguide phase-shifters has been carried out. It has been shown that the effective thermal conductance gw and the effective heat capacitance hw evaluated per unit length of the waveguide are two useful parameters contributing to the overall performance of a thermo-optic phase-shifter. Calculated values of temperature sensitivity, SH = 1/gw and thermal response time, τth = hw/gw of the phase-shifter are found to be consistent with the experimental results. Thus, a new parameter ℱH = SH/τth = 1/hw has been introduced to capture the overall figure of merit of a thermo-optic phase-shifter. A folded waveguide phase-shifter design integrated in one of the arms of a balanced MZI switch is shown to be superior to that of a straight waveguide phase-shifter of the same waveguide cross-sectional geometry. The MZI switches were designed to operate in TE-polarization over a broad wavelength range (λ ∼ 1550 nm).