Narrowband, high power VUV lamps (hv = 7.2 eV) comprising large arrays of microcavity plasmas

Flat lamps generating more than 20 W of average power in the vacuum ultraviolet (VUV; λ ≃ 172 nm) with an efficiency above 10% have been realized, and are now being manufactured. These narrowband (Δλ 500 W of peak power in ∼100 ns FWHM pulses at a repetition frequency up to 135 kHz.