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Atomic scale Monte Carlo simulation of anisotropic etching of silicon
Atomic scale Monte Carlo simulation of anisotropic etching of silicon
1998
H. Camon
Z Moktadir
M D Rouhanie
Keywords:
Computational chemistry
Anisotropy
Atomic units
Monte Carlo method
Materials science
Silicon
Computational physics
anisotropic etching
Statistical physics
Correction
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