Research on vacuum utraviolet calibration technology
2014
Importance of extreme ultraviolet (EUV) and far ultraviolet (FUV) calibration is growing fast as vacuum ultraviolet
payloads are wildly used in national space plan. A calibration device is established especially for the requirement of EUV
and FUV metrology and measurement. Spectral radiation and detector relative spectral response at EUV and FUV
wavelengths can be calibrated with accuracy of 26% and 20%, respectively. The setup of the device, theoretical model
and value retroactive method are introduced and measurement of detector relative spectral response from 30 nm to 200
nm is presented in this paper. The calibration device plays an important role in national space research.
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