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BEOL Compatible High-Capacitance MIMCAP Structure Using a Novel High k Material
BEOL Compatible High-Capacitance MIMCAP Structure Using a Novel High k Material
2020
Paul C. Jamison
John Massey
Takashi Ando
Eduard A. Cartier
Hemanth Jagannathan
P. J. Chen
Eric Liu
Alex Romero
Sebastian Naczas
Vijay Narayanan
S. Pancharatnam
Phillip Restle
Joshua M. Rubin
Nicolas Loubet
Kisik Choi
Keywords:
Compatibility (mechanics)
High-κ dielectric
Materials science
high capacitance
Optoelectronics
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