Study on the effects of proton irradiation on the dc characteristics of AlGaN/GaN high electron mobility transistors with source field plate

The effects of proton irradiation dose on the dc characteristics of AlGaN/GaN high electron mobility transistors (HEMTs) with source field plates were studied. The HEMTs were irradiated with various protons doses ranging from 5 × 1012 to 5 × 1015 cm−2 at a fixed energy of 5 MeV. HEMTs irradiated with proton dose below 5 × 1013 cm−2 showed less than 2% degradation of either saturation drain current (IDSS) or transconductance (gm). Significant changes of these parameters were observed for the devices irradiated with doses above 5 × 1013 cm−2. HEMTs irradiated with the highest proton dose of 5 × 1015 cm−2 showed a reduction of IDSS and gm of 86% and 64.7%, and a positive Vth shift of 0.84 V, respectively. Despite the significant IDSS and gm reductions, the off-state drain breakdown voltage (VBR) was improved more than five times at this particular irradiation condition. The significant improvement of off-state drain breakdown voltage was attributed to the formation of a virtual gate at drain side of gate edg...