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Effect of potassium persulfate as an additive on chemical mechanical polishing performance on C-, A- and R-plane sapphire
Effect of potassium persulfate as an additive on chemical mechanical polishing performance on C-, A- and R-plane sapphire
2020
Yanan Lu
Xinhuan Niu
Chenghui Yang
Zhaoqing Huo
Yaqi Cui
Jiakai Zhou
Zhi Wang
Keywords:
Chemistry
Inorganic chemistry
Sapphire
Chemical-mechanical planarization
Potassium persulfate
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