Device with a beam of charged particles

In recent years, a range of users for a device having a charged particle beam such as a scanning electron microscope has expanded. All users want to learn a manual adjustment technology, and it is but difficult to adjust all the parameters so that the observation has a suitable value. Thus, it is unlikely that a beginner has a sufficient performance of a device. This disclosure is intended to ensure that the device having a charged particle beam includes a parameter for adjustment exercise function to allow any user to easily learn the manual adjustment technique. To solve the problem described above, an agent for the practice is a focus adjustment and a stigma adjustment created. The operation conditions of the focus of an objective lens arrangement, an X-Y-stigmator and a stigmator be adjusted in accordance with the operation of the user. In accordance with a group of focus adjustment, an X-stigma adjustment and a Y-stigma adjustment, which are adjusted, an image for training purposes, which corresponds to the operating conditions of a storage device is read out and displayed on a screen.