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Bringing the Lab to the Fab: Robot-Based Inline Measurement System for Precise 3-D Surface Inspection in Vibrational Environments.
Bringing the Lab to the Fab: Robot-Based Inline Measurement System for Precise 3-D Surface Inspection in Vibrational Environments.
2022
Daniel Wertjanz
Ernst Csencsics
Thomas Kern
Georg Schitter
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