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Plasma etching by using PTFE
Plasma etching by using PTFE
2020
Youki Ohkubo
Momoyo Takahashi
Takayuki Kitagawa
Kazuyuki Noborio
Kohshi Taguchi
Keywords:
Etching (microfabrication)
Materials science
Plasma
Plasma etching
Composite material
Correction
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