A New Approach for the Study of Reliability for MEMS Magnetic Actuator

This paper presents a summary of the design for reliability and the reliability test procedures used for the design, fabrication and testing of a MEMS magnetic actuator. The MEMS device reliability is determined incorporating device structure, its fabrication process, the packaging, & their interacting contributions. The goal of the MEMS actuator reliability design task is to increase the probability of failure free operation of a MEMS based system for a specified time period and the use environment. The design for reliability and the subsequent reliability testing procedures are used to determine the reliability of the MEMS actuator and enable the determination of the reliability of the final product that the MEMS device is becoming part of.Copyright © 2007 by ASME