Profile characteristics of excimer laser micromachined features

In our work with excimer lasers, we observe a complex depth profile in processed blind holes that is energy, material, and process independent. This feature occurs when processing ceramics, polyimide, semiconductors, and metals. Further it occurs under different optical configurations. An understanding of this phenomena is essential when micron-precision features are required. We present our findings and explore explanations.© (1993) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.