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Plasma Nitridation of HfO2 Gate Dielectric on p-GaAs Substrates
Plasma Nitridation of HfO2 Gate Dielectric on p-GaAs Substrates
2008
Goutam Kumar Dalapati
Aditya Sridhara
Andrew See Weng Wong
Chung King Chia
Dongzhi Chi
Keywords:
Gate oxide
Plasma
Gate dielectric
Analytical chemistry
Materials science
Optoelectronics
plasma nitridation
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