Old Web
English
Sign In
Acemap
>
Paper
>
ta-C film damage of deep ultraviolet irradiation in Oxygen atmosphere
ta-C film damage of deep ultraviolet irradiation in Oxygen atmosphere
2015
Tomomi Kozu
Keywords:
Oxygen
Atmosphere
Raman spectroscopy
Diamond-like carbon
Ultraviolet
Irradiation
Amorphous carbon
Photochemistry
Materials science
ultraviolet irradiation
oxygen atmosphere
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]