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Low Energy 500 eV Focused Argon Ion Beam Provided by Multi-Ions Species Plasma FIB for Material Science Sample Preparations
Low Energy 500 eV Focused Argon Ion Beam Provided by Multi-Ions Species Plasma FIB for Material Science Sample Preparations
2021
Chengge Jiao
Jeremy Graham
Xu Xu
Timothy L. Burnett
Brandon van Leer
Keywords:
low energy
Argon
Plasma
Ion
Ion beam
Materials science
Analytical chemistry
sample
Correction
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