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Micro-opto-mechanical pressure sensor (MOMPS) in SIN integrated photonics platform
Micro-opto-mechanical pressure sensor (MOMPS) in SIN integrated photonics platform
2016
Roelof Jansen
Veronique Rochus
Jeroen Goyvaerts
Guy A. E. Vandenbosch
Bob Van de Voort
Pieter Neutens
J. O’Callaghan
Harrie Tilmans
Xavier Rottenberg
Keywords:
Photonics
Pressure sensor
Electronic engineering
Materials science
Optoelectronics
mechanical pressure
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